Wet and Dry Etching Table
Etch rates and Compatibility chart for wet etching processes. Click here to view it or here to download it (in Excel format).
Etch rates and Compatibility chart for Lam 490 etching processes. Click here to enlarge it or here to download it (in Excel format).
KOH etching
Silicon etch rates in [nm/h] for various KOH concentrations and etch temperatures
|
Temperature(oC) |
|||||||
| %KOH |
20 |
30 |
60 |
70 |
80 |
90 |
100 |
|
10 |
1.49 |
3.2 |
25.2 |
46 |
82 |
140 |
233 |
|
15 |
1.56 |
3.4 |
26.5 |
49 |
86 |
147 |
245 |
|
20 |
1.57 |
3.4 |
26.7 |
49 |
86 |
148 |
246 |
|
25 |
1.53 |
3.3 |
25.9 |
47 |
84 |
144 |
239 |
|
30 |
1.44 |
3.1 |
24.4 |
45 |
79 |
135 |
225 |
|
35 |
1.32 |
2.9 |
22.3 |
41 |
72 |
124 |
206 |
|
40 |
1.17 |
2.5 |
19.9 |
36 |
64 |
110 |
184 |
|
45 |
1.01 |
2.2 |
17.1 |
31 |
55 |
95 |
158 |
|
50 |
0.84 |
1.8 |
14.2 |
26 |
46 |
79 |
131 |
|
55 |
0.66 |
1.4 |
11.2 |
21 |
36 |
62 |
104 |
|
60 |
0.5 |
1.1 |
8.4 |
15 |
27 |
47 |
78 |
Etch rates of thermally grown silicon dioxide in [nm/h] for various KOH concentrations and etch temperatures
|
Temperature(oC)
|
|||||||
| %KOH |
20 |
30 |
60 |
70 |
80 |
90 |
100 |
|
10 |
0.4 |
1.22 |
23 |
54 |
123 |
266 |
551 |
|
15 |
0.63 |
1.91 |
36 |
85 |
193 |
416 |
862 |
|
20 |
0.88 |
2.66 |
50 |
118 |
268 |
578 |
1200 |
|
25 |
1.14 |
3.46 |
65 |
154 |
348 |
752 |
1560 |
|
30 |
1.42 |
4.32 |
81 |
193 |
435 |
940 |
1950 |
|
35 |
1.44 |
4.37 |
82 |
195 |
440 |
949 |
1970 |
|
40 |
1.33 |
4.03 |
76 |
180 |
406 |
876 |
1820 |
|
45 |
1.21 |
3.67 |
69 |
163 |
369 |
797 |
1650 |
|
50 |
1.08 |
3.28 |
62 |
146 |
330 |
713 |
1480 |
|
55 |
0.95 |
2.87 |
54 |
128 |
289 |
624 |
1290 |
|
60 |
0.81 |
2.45 |
46 |
109 |
246 |
532 |
1100 |